Slew rate
The highest rate of the position change of a nanopositioner. It is measured from the response to a large step signal.
Settling time
The time for stage to move to a commanded position and settle to within 2% of its final value of the step size. A small signal step response reflects the dynamic characteristics of the system in more detail. Therefore, small signal settling time is normally used in the specifications of nPoint’s nanopositioning products — the […]
Scale factor
The displacement per unit of command. The scale factors of nPoint’s nanopostioners are calibrated with a laser interferometer.
Resonant frequency
The first (or the lowest) resonant frequency of a nanopositioner. The resonant frequency could be of the mode along the motion axis or in other axes including rotation and other complex modes. In general, the higher the resonant frequency of a system, the higher the stability and the wider working bandwidth the system will have. […]
Resolution
The minimum step size the stage can move. It is usually defined by the position noise.