Position noise

The amplitude of the stage shaking when it is on a static command. It is usually measured and specified with RMS (1 σ) value. It is commonly used to define the resolution of the nanopositioners and is a combination of sensor noise, driver electronics noise and command noise, etc.

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Linearity error

The error between the actual position and the first-order best fit line (straight line). nPoint’s nanopositioning products are calibrated with laser interferometry and the non linearity errors are compensated with a fourth order polynomial.

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Hysteresis

The positioning error between forward scan and backward scan. A closed-loop control is an ideal solution for the problem. Capacitance sensors are normally used in nPoint’s nanopositioners to provide feedback signals. It is a non-contact displacement measurement technique, which is hysteresis free.

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Drift

A position change over time, which includes the effects of temperature change and other environmental effects. The drift may be introduced from both the mechanical system and electronics.

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Crosstalk

The positioning error along one axis generated while the nanopositioner moves in other axes, such as the stage’s response in the X axis when the stage is driven in the Y axis. Occasionally, the static linear crosstalk error can also be interpreted as orthogonal error.

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