Compact XYZ nanopositioning piezo stage with 100µm range.

Product Specs
Part Number 3715464
Footprint 40mm W x 40mm D x 47mm H
Material Aluminum/SS
Maximum Load 1.5kg
Max Force (Push/Pull) 15N
Stage Mass 160g
Nanomotion Control XYZ
Closed-loop Travel 100µm|100µm|100µm
Open-loop Travel (-30 to 150 V) 140µm|140µm|140µm
Position Noise 3nm|3nm|3nm
Stiffness 0.6N/µm|0.6N/µm|0.6N/µm
Resonant Frequency 280Hz|430Hz|280Hz
Settling Time 20ms|20ms|20ms
Linearity Deviation 0.05%|0.05%|0.05%
Capacitance 1.5µF|1.5µF|1.5µF
Integrated Sensor Strain Gauge
Cable Length 2m
Controller LC.403

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