Description

Compact nanopositioning piezo stage with 100µm range.

Product Specs
Part Number 3715515
Footprint 40mm W x 40mm D x 17mm H
Material Aluminum/SS
Maximum Load 1 kg
Max Force (Push/Pull) 100N/15N
Stage Mass 75g
Nanomotion Control X
Closed-loop Travel 100µm
Open-loop Travel (-30 to 150 V) 140µm
Position Noise 3nm
Stiffness 0.6N/µm
Resonant Frequency 1000Hz
Settling Time 5ms
Linearity Deviation 0.05%
Capacitance 1.5µF
Integrated Sensor Strain Gauge
Cable Length 2m
Controller LC.400

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