NPXY200Z10-269 Nanopositioning Piezo Stage Description
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
Product Specs
| Part Number | 3715135 |
| Footprint | 140mm W x 140mm D x 38mm H |
| Diameter | NA |
| Aperture | 68mm W x 68mm D |
| Material | Aluminum |
| Maximum Load | 5kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 950g |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 100µm|100µm|100µm |
| Open-loop Travel (-30 to 150 V) | 175µm|175µm|135µm |
| Position Noise | 0.3nm|0.3nm|0.3nm |
| Stiffness | 1.3N/µm|1.3N/µm|5.6N/µm |
| Resonant Frequency | 400Hz|400Hz|500Hz |
| Settling Time | 10ms|10ms|10ms |
| Linearity Deviation | 0.01%|0.01%|0.05% |
| Capacitance | 4.8µF|4.8µF|5.5µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.403 |