Description
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
Part Number | 3715135 |
Footprint | 140mm W x 140mm D x 38mm H |
Diameter | NA |
Aperture | 68mm W x 68mm D |
Material | Aluminum |
Maximum Load | 5kg |
Max Force (Push/Pull) | 100N/20N |
Stage Mass | 950g |
Nanomotion Control | XYZ |
Closed-loop Travel | 100µm|100µm|100µm |
Open-loop Travel (-30 to 150 V) | 175µm|175µm|135µm |
Position Noise | 0.3nm|0.3nm|0.3nm |
Stiffness | 1.3N/µm|1.3N/µm|5.6N/µm |
Resonant Frequency | 400Hz|400Hz|500Hz |
Settling Time | 10ms|10ms|10ms |
Linearity Deviation | 0.01%|0.01%|0.05% |
Capacitance | 4.8µF|4.8µF|5.5µF |
Integrated Sensor | Capacitive |
Cable Length | 2m |
Controller | LC.403 |