Description
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
Part Number | 3715264 |
Footprint | 140mm W x 140mm D x 35mm H |
Aperture | 68mm W x 68mm D |
Material | Aluminum |
Maximum Load | 1 kg |
Nanomotion Control | XYZ |
Closed-loop Travel | 100µm|100µm|25µm |
Position Noise | 0.3nm|0.3nm|0.2nm |
Resonant Frequency | 450Hz|450Hz|700Hz |
Settling Time | 10ms|10ms|5ms |
Linearity Deviation | 0.02%|0.02%|0.02% |
Controller | LC.403 |