Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

Product Specs
Part Number 3715269
Footprint 140mm W x 140mm D x 30mm H
Diameter NA
Aperture 68mm W x 68mm D
Material Aluminum
Maximum Load 5kg
Max Force (Push/Pull) 100N/20N
Stage Mass 960g
Nanomotion Control XYZ
Closed-loop Travel 200µm|200µm|10µm
Open-loop Travel (-30 to 150 V) 240µm|240µm|15µm
Position Noise 0.7nm|0.7nm|0.1nm
Stiffness 2.8N/µm|2.8N/µm|2.8N/µm
Resonant Frequency 400Hz|450Hz|900Hz
Settling Time 15ms|15ms|5ms
Linearity Deviation 0.01%|0.01%|0.02%
Capacitance 7.5µF|7.5µF|1.0µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.403

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