XY nanopositioning piezo stage with high resonant frequency and compact design allowing easy integration in space constrained applications that require precision control.

Product Specs
Part Number 3715286
Footprint 60mm W X 60mm D X 25mm H
Diameter NA
Aperture 20 mm diameter
Material Stainless Steel
Maximum Load 1kg
Max Force (Push/Pull) 100N/20N
Stage Mass 380g
Nanomotion Control XY
Closed-loop Travel 50µm|50µm
Open-loop Travel (-30 to 150 V) 70µm|70µm
Position Noise 0.2nm|0.2nm
Stiffness 8.0N/µm|8.0N/µm
Resonant Frequency 1400Hz|1400Hz
Settling Time 4ms|4ms
Linearity Deviation 0.01%|0.01%
Capacitance 2.8µF|2.8µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.402

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