XYZ nanopositioning piezo stage with high resonant frequency and compact design allowing easy integration in space constrained applications that require precision control. Designed for scanning applications such as AFM.

Product Specs
Part Number 3715477
Footprint 60mm W x 60mm D x 31mm H
Material Stainless Steel
Maximum Load 1kg
Max Force (Push/Pull) 100N/10N
Stage Mass 365g
Nanomotion Control XYZ
Closed-loop Travel 50µm|50µm|20µm
Open-loop Travel (-30 to 150 V) 65µm|65µm|35µm
Position Noise 0.2nm|0.2nm|0.1nm
Stiffness 3N/µm|3N/µm|14N/µm
Resonant Frequency 1200Hz|1200Hz|2000Hz
Settling Time 4ms|4ms|2ms
Linearity Deviation 0.01%|0.01%|0.1%
Capacitance 2.8µF|2.8µF|1.6µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.403

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