Compact, flexure-guided nanopositioning actuator made of Super Invar.

Product Specs
Part Number 3715206
Footprint 44mm H x 20mm ∅
Material Super Invar
Maximum Load 1kg
Max Force (Push/Pull) 100N/20N
Stage Mass 90g
Nanomotion Control Z
Closed-loop Travel 25µm
Open-loop Travel (-30 to 150 V) 40µm
Position Noise 0.1nm
Stiffness 20.0N/µm
Resonant Frequency 4000Hz
Settling Time 2ms
Linearity Deviation 0.01%
Capacitance 1.6µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.400

Pin It on Pinterest