Skip to Content
Hexagonal shapes

NPZ70-207

High-precision piezo stage

NPZ70-207 Nanopositioning Piezo Stage

Compact, flexure-guided actuator made of Super Invar.

Request Quote

Compact, flexure-guided actuator made of Super Invar.

Part Number3715207
Footprint85mm H x 20mm ∅
DiameterSuper Invar
MaterialSuper Invar
Maximum Load1 kg
Max Force (Push/Pull)100N/20N
Stage Mass180g
Nanomotion ControlZ
Closed-loop Travel70µm
Open-loop Travel (-30 to 150 V)100µm
Position Noise0.5nm
Stiffness11.0N/µm
Resonant Frequency2000Hz
Settling Time5ms
Linearity Deviation0.01%
Capacitance4.8µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.400

Related Resources:

Announcement