Compact, flexure-guided actuator made of Super Invar.

Product Specs
Part Number 3715207
Footprint 85mm H x 20mm ∅
Diameter Super Invar
Material Super Invar
Maximum Load 1 kg
Max Force (Push/Pull) 100N/20N
Stage Mass 180g
Nanomotion Control Z
Closed-loop Travel 70µm
Open-loop Travel (-30 to 150 V) 100µm
Position Noise 0.5nm
Stiffness 11.0N/µm
Resonant Frequency 2000Hz
Settling Time 5ms
Linearity Deviation 0.01%
Capacitance 4.8µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.400

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