Linearity error

The error between the actual position and the first-order best fit line (straight line). nPoint’s nanopositioning products are calibrated with laser interferometry and the non linearity errors are compensated with a fourth order polynomial.

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The positioning error between forward scan and backward scan. A closed-loop control is an ideal solution for the problem. Capacitance sensors are normally used in nPoint’s nanopositioners to provide feedback signals. It is a non-contact displacement measurement technique, which is hysteresis free.

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