What is the benefit of kinematic mounting?

The use of kinematic mounting virtually eliminates the effect of distortions that the piezo movement causes to the frame of the stage. It is assumed that the frame is rigid with respect to the part of the stage that moves; this is not true and can be detrimental to achieving true nanometer precision in positioning. The use of kinematic mounting also diminishes the effect that temperature variations can have on the drift of the stage.

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